PRODUCT

RF Plasma Excitation

RF Generators / Match / VHF

RF Plasma Excitation

TruPlasma radio frequency generators from TRUMPF Hüttinger provide the highest process stability of all power supplies for plasma excitation. The RF technology is therefore especially suited to processes which need the highest level of precision and reproducibility. Also in terms of energy efficiency and robustness, our RF generators are amongst the leaders on the market – they are therefore the first choice for demanding applications such as the manufacture of semi-conductor elements, microchips, solar cells or flat screens.

 

 

 

 

 

 

TruPlasma RF Series 1000 / 3000 (G2/13)

Stable processes for maximum productivity

 

The latest generation of RF generators

The decisive factor in coating or structuring surfaces is a stable and reproducible plasma current supply. RF generators of the TruPlasma RF Series 1000 / 3000 (G2/13) offer the best conditions for this with their state-of-the-art power electronics. Their stable output power and high control accuracy guarantee the best results while maintaining high levels of productivity.

n   A high level of accuracy and reproducibility

n   Independence from the RF cable length

n   Robust and safe

n   Efficient and cost-effective

n   Blower-free cooling solution

 

 

TruPlasma RF Series 3000

RF technology without compromises

 

Guarantees for excellent process results

With these RF generators you can rest assured the TruPlasma RF Series 3000 stands out for its robust design and high efficiency. This means it is best suited for stable reproducible plasma processes, such as those used during the production of semi-conductors, photovoltaic cells, or flat screens. Installed in thousands of applications around the world, these generators guarantee a high level of productivity and excellent process results.

n   Efficiency and cost-effectiveness

n   Excellent RF arc management

n   Extremely robust and high process stability

n   Maximum flexibility

 

 

 

 

 

 

TruPlasma Match Series 1000 (G2/13)

Intelligent matching through real-time measurement

 

RF system solution from a single source

The new TruPlasma Match Series 1000 (G2/13) matchboxes represent the ideal complement to RF generators from TRUMPF Hüttinger. Their intelligent matching algorithm and digital control platform for process monitoring provide a comprehensive solution in which all of the components work together optimally – the TRUMPF RF system.

n   Intelligent matching algorithm

n   Optimal interaction of the entire system

n   Real-time measurement of RF power

n   Closed loop control

n   User-friendly process monitoring

 

 

 

 

 

 

TruPlasma VHF Series 3000

Meeting every need

 

Innovative, modular, scalable: the new generator platform from TRUMPF Hüttinger

The TruPlasma VHF Series 3000 generators are based on an innovative platform concept that enables the highest level of power density and meets the most demanding process requirements. The modular and purely water-cooled construction enables the output power to be scaled to up to 80 kW. These compact VHF generators are also very cost-effective and have a robust design.

n   Precise and fast arbitrary pulse shapes

n   Minimal ramp time < 150 ns

n   Smart auto frequency tuning

n   Reliable and sophisticated process control

n   Independent of cable length

n   Robust design

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