Plasma Excitation

RF Generators / Match / VHF
Plasma Excitation

MF / Bipolar
Plasma Excitation

Pulsed DC / Highpulse(HiPIMS) / Bias 4000 series
Plasma Excitation

DC / Arc / Bias 3000 series
Induction generators

TruHeat MF Generators
Induction generators

TruHeat HF Generators
Components / Energy storage system

Charging and discharging technology perfected.
Components / Energy storage system
System Components for Plasma Excitation Application