Plasma Excitation
RF Generators / Match / VHF
Plasma Excitation
MF / Bipolar
Plasma Excitation
Pulsed DC / Highpulse(HiPIMS) / Bias 4000 series
Plasma Excitation
DC / Arc / Bias 3000 series
Induction generators
TruHeat MF Generators
Induction generators
TruHeat HF Generators
Components / Energy storage system
Charging and discharging technology perfected.
Components / Energy storage system
System Components for Plasma Excitation Application